Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12007692 | Nozzle, substrate processing apparatus, and substrate processing method | Hiroki Sakurai, Nobuhiro Ogata, Daisuke Goto, Kanta Mori, Kenji Yada +2 more | 2024-06-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12007692 | Nozzle, substrate processing apparatus, and substrate processing method | Hiroki Sakurai, Nobuhiro Ogata, Daisuke Goto, Kanta Mori, Kenji Yada +2 more | 2024-06-11 |