Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068175 | Substrate processing apparatus, mixing method, and substrate processing method | Kouji Ogura, Takao Inada, Yoshinori Nishiwaki, Hiroshi Yoshida | 2024-08-20 |
| 12033872 | Substrate processing apparatus and substrate processing method | Keita HIRASE, Koji Ogura, Hiroshi Yoshida, Takashi Nagai, Takumi Honda | 2024-07-09 |
| 11938524 | Substrate processing apparatus and substrate processing method | Mitsunori Nakamori | 2024-03-26 |