Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12033872 | Substrate processing apparatus and substrate processing method | Keita HIRASE, Koji Ogura, Hiroshi Yoshida, Takashi Nagai, Jun Nonaka | 2024-07-09 |
| 11972958 | Substrate processing apparatus and substrate processing method | Hiroyuki Masutomi | 2024-04-30 |
| 11948804 | Substrate processing method and substrate processing apparatus | — | 2024-04-02 |
| 11915947 | Substrate processing apparatus and substrate processing method | Koji Yamashita, Shinji Tahara, Hironobu Hyakutake | 2024-02-27 |