KH

Keita HIRASE

TL Tokyo Electron Limited: 1 patents #284 of 870Top 35%
Overall (2024): #387,782 of 561,600Top 70%
1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12033872 Substrate processing apparatus and substrate processing method Koji Ogura, Hiroshi Yoshida, Takashi Nagai, Jun Nonaka, Takumi Honda 2024-07-09