Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11938524 | Substrate processing apparatus and substrate processing method | Jun Nonaka | 2024-03-26 |
| 11935736 | Substrate processing method and substrate processing apparatus | Rintaro Higuchi, Tsunemoto Ogata | 2024-03-19 |