Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11866831 | Methods for wet atomic layer etching of copper | Paul Abel, Jacques Faguet, Arkalgud R. Sitaram | 2024-01-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11866831 | Methods for wet atomic layer etching of copper | Paul Abel, Jacques Faguet, Arkalgud R. Sitaram | 2024-01-09 |