Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12061097 | Substrate type sensor for measuring horizontality of substrate support member provided in atmosphere accompanied by temperature change, method for measuring horizontality of substrate support member by using the same, and non-transitory computer readable medium | Young Seop CHOI, Sang Hyun SON, Sang Min Lee, Jong Hyeon Woo, Hwan Bin Kim | 2024-08-13 |
| 12046466 | Method and apparatus for treating substrate | Hyun YOON, Jungsuk Goh, Byeong Geun Kim, Yoonki SA, Doyeon KIM +6 more | 2024-07-23 |
| 11933808 | Buffer unit and method for storaging substrate type sensor for measuring of horizontality of a substrate support member provided on a temperature varying atmosphere | Young Seop CHOI, Sang Hyun SON, Ji-Young Lee, Gyeong Ryul Kim, Sun-Yong Park | 2024-03-19 |
| 11923219 | Apparatus for treating substrate | Youngseop Choi, Young-Hun Lee, Bok Kyu LEE, Miso PARK | 2024-03-05 |