Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12061097 | Substrate type sensor for measuring horizontality of substrate support member provided in atmosphere accompanied by temperature change, method for measuring horizontality of substrate support member by using the same, and non-transitory computer readable medium | Young Seop CHOI, Yong Jun SEO, Sang Hyun SON, Sang Min Lee, Jong Hyeon Woo | 2024-08-13 |