Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12061097 | Substrate type sensor for measuring horizontality of substrate support member provided in atmosphere accompanied by temperature change, method for measuring horizontality of substrate support member by using the same, and non-transitory computer readable medium | Yong Jun SEO, Sang Hyun SON, Sang Min Lee, Jong Hyeon Woo, Hwan Bin Kim | 2024-08-13 |
| 11933808 | Buffer unit and method for storaging substrate type sensor for measuring of horizontality of a substrate support member provided on a temperature varying atmosphere | Yong Jun SEO, Sang Hyun SON, Ji-Young Lee, Gyeong Ryul Kim, Sun-Yong Park | 2024-03-19 |