Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142493 | Substrate processing apparatus and substrate processing method | Young Jun SON, Tae Hoon Lee, Sung Gyu LEE, Do Yeon Kim | 2024-11-12 |
| 12046466 | Method and apparatus for treating substrate | Yong Jun SEO, Jungsuk Goh, Byeong Geun Kim, Yoonki SA, Doyeon KIM +6 more | 2024-07-23 |
| 11960236 | Home port and substrate processing apparatus using same | Young Jun SON, Tae Hoon Lee, Do Yeon Kim | 2024-04-16 |
| 11961695 | Substrate treating apparatus, ion implantation apparatus, and ion implantation method | Doyeon KIM, Ho Jong HWANG | 2024-04-16 |