Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112960 | Apparatus for processing substrate and method of determining whether substrate treatment process is normal | Soo Yeon Shin, Hyun Hoo KIM, Myung Chan CHO | 2024-10-08 |
| 11972939 | Method and apparatus for treating substrate | Jun Keon Ahn, Soo Young Park, Jung Hwan Lee | 2024-04-30 |
| 11869763 | Apparatus and system for treating substrate | Jun Keon Ahn, Soo Young Park, Jung Hwan Lee, Seungtae YANG | 2024-01-09 |