Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112960 | Apparatus for processing substrate and method of determining whether substrate treatment process is normal | Ohyeol Kwon, Soo Yeon Shin, Hyun Hoo KIM | 2024-10-08 |
| 12094706 | Substrate treating apparatus and substrate treating method | — | 2024-09-17 |