Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112960 | Apparatus for processing substrate and method of determining whether substrate treatment process is normal | Ohyeol Kwon, Soo Yeon Shin, Myung Chan CHO | 2024-10-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112960 | Apparatus for processing substrate and method of determining whether substrate treatment process is normal | Ohyeol Kwon, Soo Yeon Shin, Myung Chan CHO | 2024-10-08 |