Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11869763 | Apparatus and system for treating substrate | Jun Keon Ahn, Soo Young Park, Ohyeol Kwon, Jung Hwan Lee | 2024-01-09 |
| 11869778 | Liquid supply unit, and apparatus and method for processing substrate | Gi Hun CHOI, Buyoung Jung, Gui Su PARK | 2024-01-09 |