Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125682 | Substrate treating apparatus and substrate treating method | Shant ARAKELYAN | 2024-10-22 |
| 12087547 | Device for multi-level pulsing, substrate processing apparatus including the same | Goon Ho Park, Jung Mo Gu, Hyun Jin Kim | 2024-09-10 |
| 12051565 | Substrate treating apparatus and impedance matching method | Young Kuk Kim, Tae Hoon Jo, Goon Ho Park | 2024-07-30 |
| 11869749 | Substrate processing apparatus and method of manufacturing thereof | Shant ARAKELYAN, Jong Hwan An | 2024-01-09 |