Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087547 | Device for multi-level pulsing, substrate processing apparatus including the same | Goon Ho Park, Ja Myung GU, Hyun Jin Kim | 2024-09-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087547 | Device for multi-level pulsing, substrate processing apparatus including the same | Goon Ho Park, Ja Myung GU, Hyun Jin Kim | 2024-09-10 |