Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087547 | Device for multi-level pulsing, substrate processing apparatus including the same | Jung Mo Gu, Ja Myung GU, Hyun Jin Kim | 2024-09-10 |
| 12051565 | Substrate treating apparatus and impedance matching method | Young Kuk Kim, Tae Hoon Jo, Ja Myung GU | 2024-07-30 |