Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125678 | Filter unit, substrate treating apparatus including the same, and substrate treating method | Ogsen Galstyan, Hyo Seong SEONG, Byeung Geon JEON | 2024-10-22 |
| 11869749 | Substrate processing apparatus and method of manufacturing thereof | Shant ARAKELYAN, Ja Myung GU | 2024-01-09 |