Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11862457 | Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device | Seongkeun Cho, Young-Hoo Kim, Seung Min Shin, Tae Min Earmme, Kun-Tack Lee +1 more | 2024-01-02 |