Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11966156 | Lithography mask repair by simulation of photoresist thickness evolution | Pradeep Vukkadala, Kunlun Bai, Xiaohan Li, Anatoly Burov, Cao Zhang +2 more | 2024-04-23 |
| 11868689 | Systems and methods for setting up a physics-based model | Chad Huard, Premkumar Panneerchelvam, Ankur Agarwal | 2024-01-09 |