AB

Anatoly Burov

KL Kla: 1 patents #57 of 230Top 25%
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1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11966156 Lithography mask repair by simulation of photoresist thickness evolution Pradeep Vukkadala, Guy Parsey, Kunlun Bai, Xiaohan Li, Cao Zhang +2 more 2024-04-23