Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11966156 | Lithography mask repair by simulation of photoresist thickness evolution | Pradeep Vukkadala, Guy Parsey, Xiaohan Li, Anatoly Burov, Cao Zhang +2 more | 2024-04-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11966156 | Lithography mask repair by simulation of photoresist thickness evolution | Pradeep Vukkadala, Guy Parsey, Xiaohan Li, Anatoly Burov, Cao Zhang +2 more | 2024-04-23 |