Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11966203 | System and method to adjust a kinetics model of surface reactions during plasma processing | Ankur Agarwal, Yiting Zhang, Haifeng Pu, Xin Li, Premkumar Panneerchelvam +2 more | 2024-04-23 |
| 11868689 | Systems and methods for setting up a physics-based model | Premkumar Panneerchelvam, Guy Parsey, Ankur Agarwal | 2024-01-09 |