Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11966203 | System and method to adjust a kinetics model of surface reactions during plasma processing | Ankur Agarwal, Chad Huard, Yiting Zhang, Xin Li, Premkumar Panneerchelvam +2 more | 2024-04-23 |