Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12025575 | Soft x-ray optics with improved filtering | Boxue Chen, Nikolay Artemiev | 2024-07-02 |
| 11880142 | Self-calibrating overlay metrology | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko +2 more | 2024-01-23 |