Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11929250 | Substrate processing apparatus, substrate processing method and a semiconductor device manufacturing method | Katsuhiro Sato, Hiroshi Fujita | 2024-03-12 |
| 11921428 | Substrate processing method and substrate processing apparatus | Yoshihiro Uozumi, Shinsuke Kimura, Yoshihiro Ogawa, Hiroyasu Iimori, Hideaki Hirabayashi +1 more | 2024-03-05 |
| 11862484 | Semiconductor manufacturing apparatus and manufacturing method of semiconductor device | Yoshihiro Ogawa, Masahiro Kiyotoshi | 2024-01-02 |