Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11994120 | Capacity control valve | Masahiro Hayama, Kohei Fukudome, Takahiro Ejima, Daichi Kurihara, Wataru Takahashi +1 more | 2024-05-28 |
| 11921428 | Substrate processing method and substrate processing apparatus | Yoshihiro Uozumi, Shinsuke Kimura, Hiroyasu Iimori, Tatsuhiko Koide, Hideaki Hirabayashi +1 more | 2024-03-05 |
| 11873804 | Capacity control valve | Daichi Kurihara, Keigo Shirafuji, Kohei Fukudome, Masahiro Hayama, Takahiro Ejima +1 more | 2024-01-16 |
| 11862484 | Semiconductor manufacturing apparatus and manufacturing method of semiconductor device | Tatsuhiko Koide, Masahiro Kiyotoshi | 2024-01-02 |