Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068267 | Semiconductor device and method for manufacturing the same | — | 2024-08-20 |
| 11921428 | Substrate processing method and substrate processing apparatus | Shinsuke Kimura, Yoshihiro Ogawa, Hiroyasu Iimori, Tatsuhiko Koide, Hideaki Hirabayashi +1 more | 2024-03-05 |