Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12046487 | Substrate treatment apparatus and substrate treatment method | Yoshinori Kitamura, Hiroaki ASHIDATE | 2024-07-23 |
| 12027380 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | Tomohiko Sugita, Hiroaki ASHIDATE | 2024-07-02 |
| 11929250 | Substrate processing apparatus, substrate processing method and a semiconductor device manufacturing method | Hiroshi Fujita, Tatsuhiko Koide | 2024-03-12 |