Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12046487 | Substrate treatment apparatus and substrate treatment method | Yoshinori Kitamura, Katsuhiro Sato | 2024-07-23 |
| 12027380 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | Tomohiko Sugita, Katsuhiro Sato | 2024-07-02 |