Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12051562 | Method, apparatus, and system for wafer grounding | Yixiang Wang, Shibing Liu, Shanhui Cao, Kangsheng Qiu, Juying Dou +4 more | 2024-07-30 |
| 12028000 | Object table comprising an electrostatic clamp | Jan-Gerard Cornelis Van Der Toorn, Jeroen Gertruda Antonius HUINCK, Han Willem Hendrik SEVERT, Allard Eelco Kooiker, Michaël Johannes Christiaan RONDE +6 more | 2024-07-02 |