Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12159804 | Tungsten molybdenum structures | Kai Wu, Dixiong WANG, Yi Luo | 2024-12-03 |
| 12094773 | Methods for low resistivity and stress tungsten gap fill | Kai Wu, Min Heon, Wei Min Chan, Tom Ho Wing Yu, Peiqi WANG +4 more | 2024-09-17 |
| 12014956 | Tungsten gapfill using molybdenum co-flow | Kai Wu | 2024-06-18 |
| 11859277 | Catalyst enhanced molybdenum deposition and gap fill | Kai Wu, Seshadri Ganguli, Xinming Zhang, Norman L. Tam, Abhilash J. Mayur | 2024-01-02 |