Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12036634 | Substrate processing control system, substrate processing control method, and program | Koichi Takeda, Kunio Oishi, Katsuhide Watanabe, Hozumi Yasuda, Yu Ishii | 2024-07-16 |
| 11897078 | Polishing apparatus, information processing system, polishing method, and computer-readable storage medium | Akira Nakamura, Yuta Suzuki, Hisanori Matsuo, Takahito Kagoshima | 2024-02-13 |