Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094752 | Wafer edge ring lifting solution | Michael R. Rice, Yogananda Sarode Vishwanath, Rajinder Dhindsa, Steven E. Babayan, Olivier Luere +2 more | 2024-09-17 |
| 11996294 | Cryogenic atomic layer etch with noble gases | Alvaro Garcia de Gorordo, Zhonghua Yao, Sang Wook Park | 2024-05-28 |