Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106945 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Cheonkyu Lee, Takafumi Noguchi | 2024-10-01 |
| 12100579 | Deposition ring for thin substrate handling via edge clamping | Abhishek Chowdhury, Edwin C. Suarez, Harisha Sathyanarayana, Nataraj Bhaskar Rao | 2024-09-24 |
| D1038049 | Cover ring for use in semiconductor processing chamber | Abhishek Chowdhury, Harisha Sathyanarayana, Edwin C. Suarez, Nataraj Bhaskar Rao | 2024-08-06 |
| 11996315 | Thin substrate handling via edge clamping | Abhishek Chowdhury, Harisha Sathyanarayana, Edwin C. Suarez, Nataraj Bhaskar Rao | 2024-05-28 |
| 11881375 | Common substrate and shadow ring lift apparatus | Abhishek Chowdhury, Nataraj Bhaskar Rao, Ravikumar Patil | 2024-01-23 |