Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148629 | Shutter disk | Kang Zhang, Junqi Wei, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2024-11-19 |
| 12100577 | High conductance inner shield for process chamber | Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2024-09-24 |
| 12080522 | Preclean chamber upper shield with showerhead | Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Kang Zhang +1 more | 2024-09-03 |
| 11881385 | Methods and apparatus for reducing defects in preclean chambers | Yueh Sheng Ow, Yuichi Wada, Junqi Wei, Kang Zhang, Ananthkrishna Jupudi +2 more | 2024-01-23 |
| 11862480 | Shutter disk | Kang Zhang, Junqi Wei, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2024-01-02 |