Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148629 | Shutter disk | Kang Zhang, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada, Ananthkrishna Jupudi +1 more | 2024-11-19 |
| 12100577 | High conductance inner shield for process chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2024-09-24 |
| 12080522 | Preclean chamber upper shield with showerhead | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Kelvin Boh, Kang Zhang +1 more | 2024-09-03 |
| 11913107 | Methods and apparatus for processing a substrate | Yueh Sheng Ow, Yuichi Wada, Kang Zhang, Kelvin Boh | 2024-02-27 |
| 11881385 | Methods and apparatus for reducing defects in preclean chambers | Yueh Sheng Ow, Yuichi Wada, Kang Zhang, Ananthkrishna Jupudi, Sarath Babu +2 more | 2024-01-23 |
| 11862480 | Shutter disk | Kang Zhang, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada, Ananthkrishna Jupudi +1 more | 2024-01-02 |