Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148629 | Shutter disk | Kang Zhang, Junqi Wei, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2024-11-19 |
| 12100577 | High conductance inner shield for process chamber | Sarath Babu, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2024-09-24 |
| 12080522 | Preclean chamber upper shield with showerhead | Sarath Babu, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Kang Zhang +1 more | 2024-09-03 |
| 11929260 | Low warpage curing methodology by inducing curvature | Fang Jie Lim, Chin Wei Tan, Jun-Liang Su, Felix Deng, Sai Kumar Kodumuri +1 more | 2024-03-12 |
| 11881385 | Methods and apparatus for reducing defects in preclean chambers | Yueh Sheng Ow, Yuichi Wada, Junqi Wei, Kang Zhang, Sarath Babu +2 more | 2024-01-23 |
| 11870202 | Solid-state power amplifiers with cooling capabilities | Rajesh Kumar Putti, Vinodh Ramachandran, Lean Wui Koh, Prashant Agarwal | 2024-01-09 |
| 11862480 | Shutter disk | Kang Zhang, Junqi Wei, Yueh Sheng Ow, Kelvin Boh, Yuichi Wada +1 more | 2024-01-02 |