Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148629 | Shutter disk | Kang Zhang, Junqi Wei, Kelvin Boh, Yuichi Wada, Ananthkrishna Jupudi +1 more | 2024-11-19 |
| 12100577 | High conductance inner shield for process chamber | Sarath Babu, Ananthkrishna Jupudi, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2024-09-24 |
| 12080522 | Preclean chamber upper shield with showerhead | Sarath Babu, Ananthkrishna Jupudi, Junqi Wei, Kelvin Boh, Kang Zhang +1 more | 2024-09-03 |
| 12074400 | Substrate dimension adapter | Mayeul Durand de Gevigney, Christophe Isnard | 2024-08-27 |
| 12048948 | Methods for forming microwave tunable composited thin-film dielectric layer | Yue Cui, Arvind Sundarrajan, Nuno Yen-Chu Chen, Guan Huei See, Felix Deng | 2024-07-30 |
| 11913107 | Methods and apparatus for processing a substrate | Yuichi Wada, Junqi Wei, Kang Zhang, Kelvin Boh | 2024-02-27 |
| 11881385 | Methods and apparatus for reducing defects in preclean chambers | Yuichi Wada, Junqi Wei, Kang Zhang, Ananthkrishna Jupudi, Sarath Babu +2 more | 2024-01-23 |
| 11862480 | Shutter disk | Kang Zhang, Junqi Wei, Kelvin Boh, Yuichi Wada, Ananthkrishna Jupudi +1 more | 2024-01-02 |