Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165987 | Frame reveals with maskless lithography in the manufacture of integrated circuits | Grant Kloster | 2024-12-10 |
| 12107044 | Metal oxycarbide resists as leave behind plugs | Marie Krysak, Kevin Lin, Charles H. Wallace | 2024-10-01 |
| 12037434 | Chemical compositions and methods of patterning microelectronic device structures | Eungnak Han, Gurpreet Singh, Tayseer Mahdi, Florian Gstrein, Lauren Doyle +2 more | 2024-07-16 |
| 12012473 | Directed self-assembly structures and techniques | James M. Blackwell, Xuanxuan Chen, Lauren Doyle, Florian Gstrein, Eungnak Han +6 more | 2024-06-18 |
| 11955377 | Differential hardmasks for modulation of electrobucket sensitivity | Kevin Lin, James M. Blackwell, Rami Hourani, Marie Krysak | 2024-04-09 |
| 11955343 | Two-stage bake photoresist with releasable quencher | Marie Krysak, James M. Blackwell, Florian Gstrein, Kent N. FRASURE | 2024-04-09 |
| 11953826 | Lined photobucket structure for back end of line (BEOL) interconnect formation | James M. Blackwell, Marie Krysak, Florian Gstrein, Eungnak Han, Kevin Lin +2 more | 2024-04-09 |
| 11874600 | Ligand-capped main group nanoparticles as high absorption extreme ultraviolet lithography resists | Marie Krysak, James M. Blackwell, Florian Gstrein | 2024-01-16 |