Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142459 | Single chamber flowable film formation and treatments | Adam J. Fischbach, Tsutomu Tanaka, Canfeng Lai | 2024-11-12 |
| 12131903 | Pulsed-plasma deposition of thin film layers | — | 2024-10-29 |
| 12074042 | High-density substrate processing systems and methods | Jason M. Schaller, Steve Hongkham, Charles T. Carlson, Tuan Nguyen, Swaminathan Srinivasan | 2024-08-27 |
| 11887811 | Semiconductor processing chambers for deposition and etch | Ravikumar Patil | 2024-01-30 |