Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148629 | Shutter disk | Kang Zhang, Junqi Wei, Yueh Sheng Ow, Yuichi Wada, Ananthkrishna Jupudi +1 more | 2024-11-19 |
| 12100577 | High conductance inner shield for process chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Yuichi Wada +1 more | 2024-09-24 |
| 12080522 | Preclean chamber upper shield with showerhead | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kang Zhang +1 more | 2024-09-03 |
| 11913107 | Methods and apparatus for processing a substrate | Yueh Sheng Ow, Yuichi Wada, Junqi Wei, Kang Zhang | 2024-02-27 |
| 11862480 | Shutter disk | Kang Zhang, Junqi Wei, Yueh Sheng Ow, Yuichi Wada, Ananthkrishna Jupudi +1 more | 2024-01-02 |