Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087554 | Substrate treating apparatus and substrate treating system having the same | Sungyeon KIM, Jungpyo Hong, Kwangnam Kim, Hyungjun Kim | 2024-09-10 |
| 12068140 | Method and system for monitoring substrate processing apparatus | Sejin OH, Taemin Earmme, Eunwoo Lee | 2024-08-20 |
| 11984304 | Apparatus and method for plasma etching | Kyohyeok Kim, Taehwa Kim, Haejoong Park, Jewoo Han | 2024-05-14 |
| 11929239 | Plasma processing apparatus and semiconductor device manufacturing method using the same | Sejin OH, Iksu Byun, Taemin Earmme, Jewoo Han | 2024-03-12 |
| 11862440 | Semiconductor processing equipment including electrostatic chuck for plasma processing | Jeongil Mun, Jinyoung Park, Hyungjoo Lee | 2024-01-02 |