Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11862440 | Semiconductor processing equipment including electrostatic chuck for plasma processing | Jinyoung Park, Jongwoo Sun, Hyungjoo Lee | 2024-01-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11862440 | Semiconductor processing equipment including electrostatic chuck for plasma processing | Jinyoung Park, Jongwoo Sun, Hyungjoo Lee | 2024-01-02 |