Issued Patents 2024
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12128524 | Membrane for carrier head with segmented substrate chuck | Steven M. Zuniga | 2024-10-29 |
| 12076877 | Polishing platens and polishing platen manufacturing methods | Bum Jick Kim, Danielle Loi, Steven M. Zuniga | 2024-09-03 |
| 12042899 | Polishing head with membrane position control | Steven M. Zuniga | 2024-07-23 |
| 11986923 | Polishing head with local wafer pressure | Andrew J. Nagengast, Steven M. Zuniga, Charles C. Garretson, Vladimir Galburt | 2024-05-21 |
| 11945073 | Dual membrane carrier head for chemical mechanical polishing | Steven M. Zuniga, Andrew J. Nagengast | 2024-04-02 |
| 11931857 | Deformable substrate chuck | Steven M. Zuniga, Andrew J. Nagengast | 2024-03-19 |
| 11919120 | Polishing system with contactless platen edge control | David J. Lischka, Danielle Loi, Steven M. Zuniga | 2024-03-05 |
| 11904429 | Substrate polishing apparatus with contact extension or adjustable stop | Steven M. Zuniga, Andrew J. Nagengast | 2024-02-20 |
| 11890717 | Polishing system with platen for substrate edge control | Steven M. Zuniga, Jeonghoon Oh | 2024-02-06 |