Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11932934 | Method for particle removal from wafers through plasma modification in pulsed PVD | Lei Zhou, Adolph Miller Allen, Vaibhav Soni, Kishor Kalathiparambil, Vanessa Faune +1 more | 2024-03-19 |
| 11898236 | Methods and apparatus for processing a substrate | Zhiyong Wang, John C. Forster, Irena H. Wysok, Tiefeng Shi, Gang Fu +9 more | 2024-02-13 |