Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12105433 | Imaging overlay targets using moiré elements and rotational symmetry arrangements | Yoel Feler, Mark Ghinovker, Diana Shaphirov, Vladimir Levinski | 2024-10-01 |
| 12013634 | Reduction or elimination of pattern placement error in metrology measurements | Yoel Feler, Vladimir Levinski, Roel Gronheid, Sharon Aharon, Anna Golotsvan +1 more | 2024-06-18 |
| 11862522 | Accuracy improvements in optical metrology | Barak Bringoltz, Ido Adam, Yoel Feler, Dror Alumot, Yuval Lamhot +6 more | 2024-01-02 |