Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12180588 | Loading device, arrangement and method for loading a reaction chamber | Johannes Wesslin, Jonas Andersson | 2024-12-31 |
| 12180587 | Vacuum chamber and arrangement for atomic layer deposition | Johannes Wesslin, Jonas Andersson | 2024-12-31 |
| 12116668 | Atomic layer deposition reactor arrangement and a method for operating an atomic layer deposition reactor arrangement | Jonas Andersson, Johannes Wesslin | 2024-10-15 |
| 12104248 | Gas feeding cup and a gas manifold assembly | Johannes Wesslin, Jonas Andersson | 2024-10-01 |
| 12000043 | Precursor source arrangement and atomic layer deposition apparatus | Hulda Aminoff, Ville Miikkulainen | 2024-06-04 |
| 11970773 | Apparatus and method for atomic layer deposition (ALD) | Matti Malila | 2024-04-30 |
| 11926896 | Atomic layer deposition apparatus | Johannes Wesslin, Jonas Andersson | 2024-03-12 |