Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12000043 | Precursor source arrangement and atomic layer deposition apparatus | Pekka Soininen, Ville Miikkulainen | 2024-06-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12000043 | Precursor source arrangement and atomic layer deposition apparatus | Pekka Soininen, Ville Miikkulainen | 2024-06-04 |