Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12180587 | Vacuum chamber and arrangement for atomic layer deposition | Pekka Soininen, Jonas Andersson | 2024-12-31 |
| 12180588 | Loading device, arrangement and method for loading a reaction chamber | Pekka Soininen, Jonas Andersson | 2024-12-31 |
| 12116668 | Atomic layer deposition reactor arrangement and a method for operating an atomic layer deposition reactor arrangement | Jonas Andersson, Pekka Soininen | 2024-10-15 |
| 12104248 | Gas feeding cup and a gas manifold assembly | Pekka Soininen, Jonas Andersson | 2024-10-01 |
| 11926896 | Atomic layer deposition apparatus | Pekka Soininen, Jonas Andersson | 2024-03-12 |